DEVELOPMENT OF AN AUTOMATIC APPLICATION UNIT OF A PHOTORESIST
Keywords:
automatic installation of photoresist application, control system, functional modules, transport robot-manipulator, centrifugeAbstract
Photolithography technology has spread widely to form topological relief on the surface of substrates from various materials (silicon, piezoceramics, quartz, optical glass, etc.) to produce an element base in microelectronics, radioelectronics, optics, microelectromechanical systems, that is, photolithography technologies and the equipment on which they are implemented, largely determine the technological and technological progress in critical production. The work is related to the creation of high-tech modules for applying photoresist, transporting substrates and their heat treatment, as well as algorithms for their operation and a software package for the control system of the automated technological installation for applying photoresist. The hardware part of the installation from the point of view of the control system is a number of devices, each of which has a set of input and output signals of a certain type. The composition of the control system is shown as three hierarchical levels.
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